Manuale d’uso / di manutenzione del prodotto S-4800 del fabbricante Hitachi
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INSTRUCTION MANUAL FOR MODEL S-4800 FIELD EMISSION SCANNING ELECTRON MICROSCOPE Please read through this manual carefully before using the instrument. • Before using the instrument, read the safety instructions and precautions carefully. • Keep this manual in a safe place nearby so it can be referred to whenever needed.
NOTICE: 1. Information contained in this document is subject to change without notice for improvement. 2. This manual is copyrighted by Hitachi High-Technologies Corporation with all rights reserved.
FOREWORD - 1 FOREWORD APPLICATION • The S-4800 SEM utilizes electron beam accelerated at 500 V to 30 kV. The instrument is designed mainly for observation and evaluation of specimens prepared for observation using SEM.
FOREWORD - 2 Before using the equipment, read this instruction manual and pertinent instruction manuals of relevant accessories to assure proper operation of the equipment. Scope of Instruction Manual This instruction manual comprises the following: 1.
FOREWORD - 3 GUARANTEE Period of Guarantee The charge-free guarantee period is one year from the date of installation. Details of Guarantee (a) The instrument will be repaired free of charge if it malfunctions due to a defect in manufacture within the charge-free guarantee period.
FOREWORD - 4 GUARANTEE (i) Failure of instrument or damage of basic software, application software or other data due to a computer virus. (j) Failure of the PC used with the instrument or damage to basic software, application software and/or data because of momentary voltage drop caused by lightning or power interruption.
FOREWORD - 5 INSTALLATION AND AFTER-SALES SERVICE Installation • Installation at delivery will be carried out by Hitachi High-Technologies Corporation installation engineers. • Before installation, refer to section 1 and prepare the necessary utilities.
FOREWORD - 6 Available Training Programs Hitachi High-Technologies Corporation offers various kinds of training programs at its own facilities or at the user’s site and facilities to ensure proper and safe operations of the equipment to its full performance.
SAFETY - 1 SAFETY SUMMARY General Safety Guidelines Before operating the machine, read the following instructions carefully: • Follow all the operating procedures provided in this manual. • Installation and maintenance must be entrusted to personnel who have received training at and are authorized by Hitachi High-Technologies Corporation.
SAFETY - 2 SAFETY SUMMARY (cont’d) • Installation at delivery, maintenance and/or relocation must be carried out under the supervision of Hitachi-approved specialists. • The customer is responsible for proper vent ilation of the room when using chemicals.
SAFETY - 3 Electrical Hazard Electrical hazards exist due to the following: Electron Gun : 0.5 to 30 kV DC Ion Pump : 5 kV DC Photomultiplier : 1 kV DC Scintillator of secondary electron detector : 10.
SAFETY - 4 High Temperature Hazard Baking the electron gun part is carried out about once per 6 months to keep high vacuum inside the part. When baking, the surface of the gun housing and ion pumps reaches around 250 ° C. The electron gun part is surrounded by a metal guard to prevent high temperature hazard caused by direct contact.
SAFETY - 5 Laser light Hazard The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Personal Computer with a laser device complies with safety standards, including International Electrotechnical Commission (IEC) 825.
SAFETY - 6 Fig S-1 Warning labels on the Main unit (standard version).
SAFETY - 7 Fig S-2 Warning labels on the Display unit (standard version) Pinch.
SAFETY - 8 （ NOTICE : (Labels with(S2) are put to SEMI-S2 guideline conforming version) Fig S-3 Warning labels on the Main unit (ANSI style labels).
SAFETY - 9 （ NOTICE : (Labels with(S2) are put to SEMI-S2 guideline conforming version) Fig S-3 Warning labels on the Display unit (ANSI style labels).
SAFETY - 10 WARNING Beware of electric shock • Voltages up to 100 V AC and 30 kV DC are used inside this instrument. Do not touch inside or you may receive an electric shock. • Do not remove the covers of column unit, control unit or power unit and do not touch internal parts or circuits while the instrument power is turned on.
SAFETY - 11 WARNING (cont’d) Laser Light The CD-ROM or CD R/W drive in the personal computer provides with a laser device. Be sure to observe the following warnings when operating a product equipped with a laser device. ・ Do not try to open the unit enclosure.
SAFETY - 12 Other Relevant Precautions • Water Leakage Detection A water-leakage detector is not provided with this equipment. Water leakage may be caused by corrosion and cracks along the wate r flow system developed by changes in cooling-water quality and pressure.
SAFETY - 13 Other Relevant Precautions (cont’d) • Third Party’s Application Programs Do not install a third party’s application programs into the PC of the equipment. Those application programs can be responsible for display of unexpected windows, adverse effects on the equipment, and interference in the operation of the system program.
SAFETY - 14 Other Relevant Precautions (cont’d) (d) Power Saving mode Do not use the Power Saving mode. It will cause trouble for communication between the PC and internal microprocessor. (f) Virtual memory setting Do not change the virtual memory setting.
SAFETY - 15 Emergency Off Button The Emergency Off button (EMO) is a red, mushroom shaped pushbutton switche, that is located on the Evacuation control panel of Main unit. Its purpose is to shut off all power in the system when pushed, and it is a non- momentary swit ch which is never be overridden even during servicing of the system.
SAFETY - 16 Main Power Disconnect Lock out/tag out procedure are very important safety concern. The purpose of the lock out/tag out procedure is to insure safety while working on electrical and mechanical equipment. Make sure you get introduced to the person responsible for the equipment at the site.
SAFETY - 17 INTERLOCK Electron Gun The Gun cable is now interlocked with a momentary switch. If the cover at the top of the electron gun is removed to disconnect gun cable, the High Voltage applied to the electron gun is shut off. This switch can be overridden for service.
SAFETY - 18 Fig S- 6 Location of safety interlock.
SAFETY - 19 Fig S- 7 Protection from movement during earthquakes (Display unit).
SAFETY - 20 Fig S- 8 Protection from movement during earthquakes (Main unit).
SAFETY - 21 Fig S- 9 Gravity location of Main unit (Type1).
SAFETY - 22 Fig S- 10 Gravity location of Main unit (Type2).
SAFETY - 23 Fig S- 11 Gravity location of Display unit (Not include monitor display).
SAFETY - 24 Fig S- 12 An example of the water-leakage detector.
PRECAUTION - 1 PRECAUTIONS ON HANDLING For the sake of safety, the following points should be taken into consideration. 1. PRECAUTIONS FOR TRANSPORT CAUTION (1) Do not lift the instrument by holding the table. The strength of table fitting is not sufficient for bearing the weight of display unit, approximately 200 kg.
PRECAUTION - 2 CAUTION (1) Never touch the electron gun with bare hands in the course of baking and cooling. High temperature during baking may cause burns. (2) When using liquid nitrogen, wear leather gloves and protective glasses. There is danger if it touches the skin as it can cause low temperature burns.
PRECAUTION - 3 (1) Allow an interval of at least 20 seconds between turning on or off the EVAC POWER and DISPLAY POWER switches. (2) Replace the oil filter of the oil-sealed rotary pump every six months. (3) For the air compressor and oil-sealed rotary pump, perform draining of water, check of oil level etc.
PRECAUTION - 4 5. CAUTIONS ON OPERATION (1) During operation, occasionally confirm that the ion pumps are in a stable state. IP-1 2 × 10 -7 Pa or better IP-2 2 × 10 -6 Pa or better IP-3 5 × 10 -5 Pa or better (2) When emission current varies widely during operation depress the HV OFF switch to cut off high voltage of the electron gun.
PRECAUTION - 5 7. FLASHING (1) Principle of Field Emission Electron Gun Figure 1 shows the principle of the field emission electron gun. The gun consists of cathode, first anode and second anode. An extracting voltage (Vext) is applied between the cathode and first anode, and electrons are emitted from the cathode.
PRECAUTION - 6 Fig. 3 Status Transition of Adsorbed Gas Molecules on Cathode Tip A : In the initial reduction period, or just after flashing, gas is completely discharged from the cathode tip. (See (a) of Fig. 3.) As gas molecules are gradually adsorbed onto the cathode, emission current decreases.
PRECAUTION - 7 (3) Flashing Procedure (a) Check and set up intensity of flashing as follows: Click the HV display area on the control panel. The HV control dialog window will open. (b) Click the Flashing button on it. The Flashing execution dialog window will open.
PRECAUTION - 8 SPECIFICA TION Specifications for Hitachi Model S-4800, Field Emission Scanning Electron Microscope 1. Resolution: Accelerating voltage 15 kV Working distance = 4 mm .............................. 1.0 nm Accelerating voltage 1 kV Working distance = 1.
PRECAUTION - 9 4. Specimen Stage Motion Model S-4800, Type I Model S-4800, Type II X Traverse 0 to 50 mm (continuous) 0 to 110 mm (continuous) Y Traverse 0 to 50 mm (continuous) 0 to 110 mm (continuous) Z Traverse 1.5 to 30.0 mm (cont inuous) 1.5 to 40.
PRECAUTION - 10 (6) Signal processing modes .................... Automatic brightness control, Gamma control, Automatic focus, Automatic stigmator (7) Automatic data display ........................ Image number, accelerating voltage, magnification, micron bar, micron value, date/time and working distance can be printed on the film.
PRECAUTION - 11 INST ALLA TION CONDITIONS 1. Power Requirements 100 V AC ( ± 10%), single phase, 50/60 Hz, 4 kVA In case to use other voltage than 100V AC, a double insulation transformer should be provided by user. Exclusive grounding of less than 100 ohms in ground resistance should be provided by user.
PRECAUTION - 12 (4) Floor vibration S-4800 Type I S-4800 Type II The allowable amplitude corresponds to an image deviation of less than 0.2 mm on a micrograph at magnification 220,000 × (5) Acoustic noise .
PRECAUTION - 13 4. Water Supply and Drain (1) Water flow rate ........................ 1 to 1.5 L/min (2) Water pressure ........................ 50 to 100 kPa (3) Water temperature ................... 10 to 20 ° C (temperature variation: less than 0.
- i - MODEL S-4800 FIELD EMISSION SCANNING ELECTRON MICROSCOPE Table of Contents FOREWORD...................................................................................................... FOREWORD-1 Scope of Instruction Manual ....................
- ii - Table of Contents (Cont’d) PRECAUTIONS ON HANDL ING ...................................................................... PRECAUTION-1 1. Precautions for Transport ................................................................... PRECAUTION-1 2.
- iii - Table of Contents (Cont’d) 2. FUNCTIONS .................................................................................................................. 2 -1 2.1 Control Knobs and Switches on Main Unit .....................................
- iv - Table of Contents (Cont’d) 3.3 Application of High Voltage .................................................................................. 3-12 3.3.1 Condition where the gun high voltage is applicable ................................ 3-12 3.
- v - Table of Contents (Cont’d) 3.9.8 Data Entry Function ................................................................................ 3-94 3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation ....................... 3-97 3.9.11 Printing images using Report generation function .
- vi - Table of Contents (Cont’d) 4.4 Troubleshooting .................................................................................................... 4-12 4.4.1 When Column Evacuation does not Work ..............................................
1-1 1. INSTALLATION Only the persons who have been trained by a cert ified engineer of the manufacturer are allowed to carry out the installation work described below.
1-2 1.1.3 Line Power Requirement (1) Single-phase AC, 4 kVA, 50/60 Hz. When the supplied power line voltage is 100V, the instrument works by direct connection. When the supplied power line voltage is other than 100V (200V or others), use a step down transformer to step the power line voltage down to 100V.
1-3 1.1.6 Stray Magnetic Field You should measure the stray magnetic field at the place for installing the Model S-4700 in advance. When the requirements given in Table 1- 1 are satisfied, no image trouble will occur.
1-4 remains unaffected so far as the field strength is within a few ten µ T. 8. The allowable values given in Table 1-1 are applicable at the specified working distances (4 mm at accelerating voltage 15 kV and 1.5 mm at 1 kV). At a longer working distance, the allowable value of stray magnetic field becomes smaller.
1-5 Figure 1-1 shows the relation between frequency of floor vibration and vibration transmittance of the instrument. Since the vibration transmittance is maximum at the resonance point (about 2 Hz) of the anti-vibration mount provided with the instrument, the allowable amplitude is minimum at this point.
1-6 1.1.8 Power Line Noise and Electric Field Noise Image troubles may be observed when a device as given in Table 1-3 or its power line is installed nearby or, even if it is distant, it is a heavy duty type. When selecting the installation site, therefore, whether a source of interference is located nearby or not must be checked.
1-7 1.1.9 Disturbance by Sound Waves Sound waves (vibrations of air) adversely affect the Model S-4800 regardless of their frequency and may cause image trouble. To prevent this, confirm before installation that equipment which may cause a sonic disturbance is not located in the vicinity of the S-4800.
1-8 Fig. 1-2 Installation Layout example 3400 526 (500) (800) ∗ 1 840 1000 (225) 1100 400 225 230 (540) 960 (400) 966 3000 RP Weight Air compressor Main column unit Display unit Cooling water circul.
1-9 1.2 Materials or Instruments to be prepared by User See Table 1-4. Table 1-4 Materials or Instruments to be Prepared by User Name Quantity Remarks Ethanol 500 mL Used for cleaning parts. Acetone 500 mL Used for cleaning parts. Liquid nitrogen 2 L/day For cooli ng the anti-contamination trap.
1-10 1.3.1 Power and Ground Wirings The instrument operates only with a power supply of AC100 V. If using a power voltage other than AC100 V, the double insulation transformer (option) is required. The transformer shall be put after MAIN switch of S-4800.
1-11 Use 8 square mm cable with M5 wire terminal. CAUTION Be sure that the output of the step down transformer is AC100V ±10%. Irregular connection causing higher voltage will result serious damage to the equipment. Alternately the step down transformer may be put at the input of S-4800.
2 - 1 2. FUNCTIONS Fig. 2-1a and 2-1b show the appearance of the Model S-4800 type 1 and Type2. M a i n u n i t D i s p l a y u n i t Fig. 2-1a Model S-4800 System (type 1) Fig.
2 - 2 2.1 Control Knobs and Switches on Main Unit 2.1.1 Main unit (Column) Fig. 2-2 shows the appearance of the S-4800 main unit (type I). Fig. 2-2 S-4800 Main Unit (type 1) Beam monitor preamplifier .
2 - 3 Fig. 2-3 sketches the sectional view of the S-4800 column. Fig. 2-3 Sectional View of S-4800 Column Beam monitor aperture Specimen goniometer stage Electron gun 1st condenser lens Gun valve (V-1.
2 - 4 Fig. 2-4 shows the Type 1 specimen stage. Fig. 2-4 Specimen Stage (type I) [X] control : Moves specimen in X direction within a range from 0 to 50 mm. [Y] control : Moves specimen in Y direction within a range from 0 to 50 mm. [Z] control : Moves specimen in Z direction or shifts WD (Working Distance) within a range from 1.
2 - 5 Fig. 2-5 shows the appearance of large s pecimen stage driven by motors (type II). Fig. 2-5 Large Specimen Stage (type II) Range of movement in X direction : 0 to 110 mm Range of movement in Y direction : 0 to 110 mm Range of movement in Z direction : WD = 1.
2 - 6 Fig. 2-6a and 2-6b show the specimen exc hange device of Type 1 and type2 instruments. Specimen exchange Exchange chamber Viewing window Exchange rod c o n t r o l s w i t c h e s (a) Type1 (b) Type2 Fig.
2 - 7 Fig. 2-7 shows the block diagram of evacuating system. RP TMP BT SC:Specimen chamber SEC: Specimen exchange chamber 1st intermediate Chamber Electron gun chamber IP1 IP3 IP2 MV1 V3 LV MV3 MV2 V2 GV V1 PiG-2 PeG PiG-1 RP leak valve 2nd intermediate Chamber Fig.
2 - 8 Fig. 2-8a shows the control panel for evacuation. Fig. 2-8a Evacuation Control Panel [EMERGENCY OFF] switch : Shuts down S-4800 entirely in an emergency. [EVAC POWER] switch : Main switch of evacuation system. [STAGE POWER] switch : Main switch of Stage controller (Type 2 only).
2 - 9 Fig. 2-8b shows the Display / Operation area. Fig. 2-8a Display / Operation area Vacuum of each chamber, status of evacuation sequence and messages are displayed on this area. • Status indicator lamps : When each lamp (IP1 to SEC) is lit, it shows that the corresponding chamber is in good vacuum.
2 - 10 The display status changes as the following table by depressing the MODE switch. Display status Status indicator lamp Numeric / character display description Initial status No lamp blinks No in.
2 - 11 The following tables show alarm or error message and how to recover from the error. Errors with (*) mark are caused by failure on equipment. [Alarm for operation] Message No. description recovering operation E10 (+ buzzer) Specimen exchange rod is not at proper position when the GV is to be closed.
2 - 12 ［ Alarm according to gun baking ］ Message No. description recovering operation E31(+ buzzer) HV cable head is not placed to t the cable holder properly. E32(+ buzzer) Baking protection cover is not put. E34(+ buzzer) Ion pump high voltage is not applied.
2 - 13 2.2 Control Knobs and Switches on Display Unit 2.2.1 Display Figure 2-9 shows the display unit. C980012 Fig. 2-9 Display Unit • PC ： SEM control personal computer. Placed inside of the door. • Monitor display ： Display monitor of PC. For adjustment of the monitor, refer to instruction manual of the monitor.
2 - 14 Fig. 2-10 shows the front panel of PC. Fig. 2-10 PC Panel • PC power switch : Power switch of PC. Usually the switch need not be used. PC power is controlled with DISPLAY power switch. • FD drive unit : Floppy disk drive. Be careful not to insert or remove disk while the access lamp is lit.
2 - 15 [Focus] [Coarse] [Fine] knobs : Use for coarse and fine focus adjustment. • Magnification/Image shift control section [Magnification] knob : Use for Magnification setting. [Image Shift] knobs : Move image by electrical image shift. • Brightness/Contrast adjusting section [Brightness] knob : Use for brightness adjustment.
2 - 16 2.3 Graphical User Interface (GUI) 2.3.1 Starting the PC and logging in the S-4800 program Use the following steps to log on to Windows 2000. (1) Starting up the PC Turn the DISPLAY power switch on. For some models of the PC, the power switch of the PC shall be turned on.
2 - 17 The S-4800 login dialog window will open. Fig. 2-15 S-4800 Loin dialog window At the first starting up after installation of the program, use the log-in name [S-4800] and click the OK button. You need no Password. After log-in names and passwords for them are set, input the name and the password and then, click the OK button.
2 - 18 2.3.2 S-4800 SEM Main Window The following is the main window for operation of the microscope. Fig. 2-16 S-4700 Operation Window Fig 2-16 S-4800 Main window • Title bar: Shows the window title Minimize button: Minimizes the window. The window is iconized and placed on the Task bar Size button: The window status becomes Normal type.
2 - 19 Three modes of scanning image display are ava ilable, Full screen (shown on previous page), Small screen (Fig 2-17 left) and Dual screen (Fig 2-17 right). Fig 2-17 S-4800 Main window (Small and Dual screen mode) 2.3.3 Control arrangement on the window Operation tools are placed as follows.
2 - 20 (3) Menu bar Almost functions are executed on the menu bar. (4) Mouse operation on the scanning image The S button of mouse changes operation on the scanning image alternately.
2 - 21 2.3.4 Menu The menu bar and the toolbar include the following menus and commands. (1) File menu: The File menu includes commands for opening SEM Data Manager, saving files, photo recording, and image printing. • Open SEM Data Manager Opens the SEM Data Manager window.
2 - 22 • Column Opens the Column tab of the Setup dialog window. Use it to select the optimal electron optical column. Refer to <3.4 Optimizing the electron beam> • Condition Load Opens the Op. Cond . Tab of the Setup dialog window. Use it for loading and reproducing previously saved electron optical column condition.
2 - 23 (5) Scan menu: The Scan menu includes commands for scanning control. • Run ( Freeze ) Runs or Freezes scanning alternately. • Capture Starts image capturing. Refer to <3.6.4 Image Capturing> • Capture Reso Selects capturing image resolution • Split DM Mode Activates Split/Dual Mag mode.
2 - 24 (8) Option menu: The Option menu includes commands for optional functions. • Optional Setup - Op. Panel Setting Opens Op. Panel tab of the Optional Setup dialog window. Use for arrangement of functions on the Operation Panel. Refer to <3.9.
2 - 25 (10) Help menu: Opens Help for S-4700 SEM operation. • Maintenance Opens the Maintenance dialog window. Use it for checking status of the Evacuation system, gun baking operation and ECO mode setting. • Index Show the index of S-4800 Help. • Search Show the key-word search of S-4800 Help.
2 - 26 2.3.5 Control Panel Most frequently used controls such that for Image observation, image recording. Usual operation will be able to perform using the Control panel and the manual operation panel. In case of present model S-4700 and S-5200, these controls are placed on the Toolbar and on the top of the Scanning Image window.
2 - 27 When HV has been applied, click SET button after changing HV value. • Set Ie to button shows a pull down list of Ie (emission current) value. Select a Ie value. • Vext indicator Extracting voltage value is indicated. • Flashing button The button further opens Flasing controller.
2 - 28 2.3.5.3 Scan control block (1) Run button Run or freeze scanning. The button is when scanning and changed to while scan is frozen. To stop scanning, click the button. Scanning continues until it goes to the end of the frame and then, stops. If you wish to stop scanning immediately, click the button again.
2 - 29 little or no surface detail on the specimen, or when the specimen is charged, Auto Focus will not operate properly. 2.3.5.5 Monitoring function (1) Align Opens Alignment dialog window and starts Aperture alignment. Refer to <3.4.3 Column Alignment operation> (2) Monit Waveform monitor mode is activated.
2 - 30 Alternately, click the area with the right button to increase or with the left button to decrease magnification in a step. (2) Preset button The three preset magnifications are toggled through with each click of the button.
2 - 31 Direct Save : Opens the Save Image dialog window. Use it for saving viewing images to disk. (To save captured images, use the Save button in the Captured Image window.. Layout Print : Opens the Report Generation dialog window. Use it for printing viewing images to a Windows-supported printer.
2 - 32 button is green when the stage is at home position. (3) EXC button Move the stage to the position for specimen exchange (X=35, Y=0mm). The indication window beside the button is green when the stage is at specimen exchange position.
2 - 33 (4) Record A / B selection It selects which screen is to be recorded by Record functions. 2.3.6 Operation Panel Operation Panel has three tabs. Controls and setup tools for SEM operation are placed on the SEM and UTILITY tabs. Arrangement of controls is possible to be customized over two tabs.
2 - 34 2.3.6.1 SIGNAL SELECT block (1) Signal select box Selects image signal for Full and Small screen mode and the A image of Dual screen mode. (2) Right half image Signal select box Selects image signal for the B image of Dual screen mode and the right half image of Split / Dual mag mode.
2 - 35 2.3.6.2 OPE CONDITION block (1) Probe Current mode selection Select Normal for resolution prior application or High for application needs large probe current. Refer to <3.4 Optimizing the Electron beam> (2) Focus mode selection Select UHR or HR.
2 - 36 2.3.6.3 R.ROTATION block Controls electron beam scanning direction to rotate image. To activate raster rotation, check the ON/OFF check box. Rotation angle can be set with the slider, clicking the side of slider, clicking the Angle adjust button or with 90 ° step rotate button.
2 - 37 2.3.6.5 SCAN SIZE block Selects a screen mode. (1) Full : Full screen mode Scanning image is displayed on full desktop. (2) Dual : Dual screen mode Two image screens are displayed. Use the mode to observe different signal images simultaneously or for color mixing image observation.
2 - 38 2.3.6.7 SIGNAL PROCESSING block Applies real time digital image processing to the scanning image. (1) Processing selection box Selects a processing • Smooth : Applies pixel averaging spatial filtering. Reduces snow noise. Effective especially in case of high magni fication image where the beam spot size is larger than pixel size.
2 - 39 2.3.6.8 TILT COMPENSATION block Specimen tilting causes defocusing and magnification change to the tilt direction. Tilt compensation is the tool to correct the two phenomena. (1) Dynamic focus Dynamic Focus scans the focal length linked with the scanning positions.
2 - 40 then a color composite image of yellow BSE and Blue SE is displayed. To return to standard image display mode, uncheck the COLOR MIXING box. A color mixing image can be saved as a 24 bit color image file. Select B of the Record A/B buttons and then, save the image.
2 - 41 2.3.6.13 Arrangement of control blocks Above controls are placed on SEM and UTILITY tabs by user arrangement. Open the Operation Panel tab of the Optional setup dialog window by selecting Option menu – Optional Setup – Op.Panel Setting. It is recommended to place frequently used controls on the SEM tab, and others to Utility tab.
2 - 42 2.3.7 Mouse operation on the scanning image Mouse operation tools for adjusting focus, stigma, contrast, brightness and specimen stage are provided. 2.3.7.1. Exchanging mouse control functions Mouse operation tools are divided in three groups, focus/stigma/contrast/brightness and specimen stage and no operation.
2 - 43 Area Coarse focus adjustment : move mouse horizontally pressing down right button. Fine focus adjustment : move mouse horizontally pressing down left button. Area Stigma adjustment (X) : move mouse horizontally pressing down left button. Stigma adjustment (Y) : move mouse horizontally pressing down right button.
2 - 44 2.3.7.3 Stage and image shift tools Controls shown below will be shown on the scanning image. Type1 manual stage Type2 motorized stage Fig 2-23 Mouse control (stage) (1) Type1 manual stage It is for image shift operation. Move the mouse pointer to a position to be moved and press down left or right button.
2 - 45 2.3.8.1 Column tab The Column tab is for setting operating condition of the electron optical column. (1) HIGH MAG MODE block Set column condition for High Mag mode. (1-1) Probe current Select Normal or High. For resolution prior operation, use Normal.
2 - 46 particularly in the central field of view at low magnifications. In such a case, use Low Mag mode for observation at low magnifications. Turning Specimen Bias Voltage ON and OFF may cause change of focus, astigmatism and aperture alignment and need adjustment.
2 - 47 2.3.8.2 Image tab The Image tab is for setting operating condition regarding to image observation. (1) PRESET MAGNIFICATION block Select or input desired value in the three preset magnification boxes. (2) ABCC block If the results of ABCC are not adequate, you can change the reference brightness and contrast.
2 - 48 2.3.8.3 Record tab (1) AUTO DATA DISPLAY block (1-1) Auto Data Display Auto data display is engaged when this box is checked. (1-2) Magnification to Time and Signal Name checkboxes These items are include in data display if checked. (1-3) Data Number input box Input data number into this box.
2 - 49 For 640×480 pixels image data → 960 lines (16/19 s photographing time) For 1280×960 pixels image data → 19200 lines (32/38 s photographing time) For 2560×1920 pixels image data → 1920 lines (32/38 s photographing time) (3) BRIGHTNESS/CONTRAST block Sets brightness and contrast for photo recording.
2 - 50 2.3.8.4 OP. Cond tab This function is provided for saving and loading conditions of the electron optical column. Save Load Fig 2-24 Condition Load/Save For detail of operation, refer to < 3.
2 - 51 2.3.9 Captured Image Window Captured images are displayed as thumbnails on this window. It opens when you captured an image. Also it can be opened by selecting Captured Image command from Window menu or using the short-cut key (Ctrl + L). The yellow border shows the present selected image.
2 - 52 2.3.10 SEM Data Manager Window SEM Data Manager is an image-filing program with an easy-to-operate database function. Images are registered to the database automatically when saved. For detail, refer to <3.12 Using SEM Data Manager> 2.3.11 Alignment Dialog Window The Alignment dialog window is used for alignment operations.
2 - 53 2.3.12 CD Measurement dialog window (option) Refer to the operation manual of the function. 2.3.13 Comm Port Setting Dialog Window Set parameters for the RS-232C communication ports. Use this command only when the change of the parameters are required.
2 - 54 2.3.15 Oblique Dialog Window The Oblique dialog window is used to display an oblique image. To open the dialog window, select the Oblique command from the Analysis menu.
2 - 55 2.3.17 Save Image Dialog Window The Save Image dialog window is used for saving scanning images or captured images. To save scanning images, Use the Direct save button on the Control panel. Use the save button on the captured image window to save captured images.
2 - 56 2.3.20 Using Short-Cut Keys Short-cut keys are available for execution of many commands. (1) Using short-cut keys Input Alt + [underlined character in a main menu command] opens the pull-down menu. And then, [underlined character in a pull-down m enu] executes the command.
3 - 1 3. OPERATION Shown below is the procedural flow of typical SEM operation. For details, refer to each subsection. 3.1 Preliminary Operation • Check of Column Vacuum .................................. (3.1.1) • Starting the Di splay ..........
3 - 2 3.9 At the End of Daily Use 3.10 Using Other Functions 3.11 Image Quality • Turning High Volt age Off .................................... (3.9.1) • Specimen Exchange Po sition ............................. (3.9.2) • Taking the Specimen out of the Chamber .
3 - 3 3.1 Preliminary Operation 3.1.1 Check of Column Vacuum At the beginning of SEM operation, check the evacuation control panel. The following conditions must be met: (1) Lamps of IP1 , IP2 and IP3 RESET switches are lit. (2) Ion pump readings are better than the followings.
3 - 4 3.1.2 Flow the cooling water S-4800 requires water flow for cooling the objective lens coil. It is necessary while the Display unit is powered on. A water valve is provided and is open when the S-4800 control program starts up. It is closed when the POWER switch of the display unit is turned off.
3 - 5 ☼☼● ● : 1.8 L / minute ☼☼●☼ : 1.95 L / minute ← maximum value ☼☼☼☼ : 2.25 L / minute or more (4) Warning message When water flow is over the maximum limit, E-13 error will be shown on the Evacuation control panel. No buzzer sounds in the case.
3 - 6 3.1.4 Use of Anti-Contamination Trap For image observation at high magnifications or low accelerating voltages, the use of the Anti- contamination trap is recommended to prevent s pecimen contamination by hydrocarbon build-up. The traps need to be filled with liquid nitrogen.
3 - 7 3.2 Specimen Setting and Specimen Exchange 3.2.1 Cautions on Specimen Preparation During specimen preparation, observe the followings. (1) Use clean gloves when exchanging specimens. Holding the specimen or specimen stub with bare hands should be avoided.
3 - 8 3.2.3 Adjustment of Specimen Height Put the specimen stub on the specimen holder and adjust it to the proper height using the specimen height gauge as shown in the figure. To adjust, loosen the lock screw and adjust the specimen height so that the highest point of the specimen is the same as the bottom of the height gauge.
3 - 9 (2) Type II (5-axis motorized stage): Click the EXC button on the control panel. The stage is then moved to the specimen exchange position, and the color of the indicator beside the button turns green. Specimen exchange positions: X : 35.0mm Y : 55.
3 - 10 (2) Turn the knob of the specimen exchange rod clockwise so as the Unlock mark comes upwards. Insert the rod straightly and plug the two spring pins at the end of the rod to holes of the specimen holder. Turn the knob counterclockwise so as the Lock mark comes upwards to hook on the specimen holder.
3 - 11 3.2.5.2 Opening the specimen exchange chamber door When a specimen is not set inside the c hamber and the specimen exchange chamber has been evacuated, open the exchange chamber door as follows. (1) Press the AIR button on the specimen exchange chamber.
3 - 12 3.3 Application of High Voltage 3.3.1 Condition where the gun high voltage is applicable You can apply high voltage when the HV display area on the control panel is blinking with yellow and blue colors. When the indication is blue, high voltage can not be applied.
3 - 13 (3) Set Intensity to “2” and click Execute button. The emission current value caused by flashing will be displayed on the Ie part of the HV Display area about 2 seconds.
3 - 14 3.3.4 Application of High Voltage When the HV Display are is blinking with yellow and blue color, click the ON button on the control panel at the left of the HV Display area. Accelerating voltage (Vacc) and extracting voltage (Vext) are then applied with the emission current values indicated in the HV display area.
3 - 15 3.4 Optimizing the Electron Beam 3.4.1 Selecting a Magnification Mode S-4800 provides two magnification modes, High Mag mode and Low Mag mode. Magnification range of the modes are as follows.
3 - 16 surface of the specimen. At a shorter WD, higher resolution is attainable. At a longer WD, a larger tilt angle and a greater depth of focus is attainable. When a WD is selected from pull-down menu, the objective lens current is adjusted in order to focus an image at the specified WD.
3 - 17 For detailed condition setting, lick the Setup button on the above OPE CONDITION block. The Column tab of the Setup dialog window will open. (Alternately the Column command in the Setup menu or the Setup button on the tool button area of the Operation panel are available.
3 - 18 select a number from the pull-down menu, click on the up and down button (0.1 step), or key in a number (0.5 to 2.0) followed by the Return key.
3 - 19 brightness in the field of view. In such a case, decrease the size of the specimen, use a longer WD, or lower the accelerating voltage in order to correct the astigmatism. (7) Degauss Operation The Degauss operation eliminates hysteresis of the magnetic field in the objective lens.
3 - 20 3.4.3 Column Alignment Operation For the best performance of the instrument, alignment of the electron optical column axis is necessary. Generally, an electromagnetic alignment is sufficient, while a mechanical alignment may be needed for more critical applications.
3 - 21 (1) Beam Alignment Beam Alignment is necessary in order to a lign the electron beam down the center of the electron optical column and through the center of the objective lens aperture. (a) Open the Alignment dialog window by clicking the button on the Control Panel.
3 - 22 objective lens by clicking the DeGauss button in the Column tab. Precise Aperture Alignment is difficult at low magnifications of 10,000 times or lower. After coarse alignment at low magnifications, do fine alignment at high magnifications of a few ten thousand times.
3 - 23 NOTICE: Complete Beam Alignment and Aperture A lignment before starting Low Mag Position mode. Low Mag Position adjustment is necessa ry for each Operation Mode. When you changed Operation mode, you need to adjust it again. WD (mm) Low est magnification in High Mag Mode Low est magnification in Low Mag Mode 1.
3 - 24 3.5 Operation for Image Observation Follow the operation below for observation of a scanning image. 3.5.1 SE detector S-4800 has two secondary electron detectors. the upper and the lower. The upper secondary electron detector is placed above the objective lens and secondary electrons are detected through the magnetic field of the lens.
3 - 25 The signal intensity of the lower detector significantly decreases at short WD conditions. It is recommended to use the lower detector at a WD of 7mm or longer. (3) Mixed Signal of Upper and Lower Detectors: The upper and lower detector signals can be mixed to show characteristics of both detectors.
3 - 26 General Characteristic of signals utilized in S-4800 Signal Characteristics Applications SE signal ･ High resolution surface information ･ Voltage contrast ･ High edge contrast ･ Sensit.
3 - 27 The image formed with the upper detector is similar to of pure SE. (2) BSE-L Signal Detection When the +BSE button and one of L.A. (L.A.0 to L.A. 100) is selected in the BSE ratio selection box, the upper detector detects the both SE and BSE-L signal combined.
3 - 28 3.5.2 Selecting Magnification There are several ways to select a magnification. (1) Dragging the mouse in the Magnification indication area on the control panel. To increase magnification, drag the mouse to the right. To decrease magnification, drag the mouse to the left.
3 - 29 3.5.3 Selecting Scanning Speed Eight scanning speeds are available with four buttons. To select a scanning speed, click one of the Scan speed icons on the control panel. Two scanning speeds are assigned to each button. They are set alternately by clicking the button.
3 - 30 Slow1 and Slow are relatively fast slow scan. These two speeds are asynchronous to AC line frequency. It may cause some field magnetic disturbance at high magnification and/or low kV condition. Use for a field search of the specimen, coarse focus, etc.
3 - 31 3.5.4 Image Brightness and Contrast Adjustment Image brightness and contrast can be adj usted both manually and automatically. BC Monitor mode is also available for manual adjustment. The Beam Monitor function is provided to reduce the tip noise.
3 - 32 Sensitivity of mouse operation can be adjusted on the Mouse Operation tab in the Optional setup dialog window. Additionally, you can adjust the brightness and contrast using the scroll bars. Checking the Scroll Bar box on the Utility tab in the Operation panel enables these scroll bars.
3 - 33 current; for example, during quantitative X-ray analysis using a probe current drift cancellation function, etc. When the Beam Monitor function is not desirable, for example in case of observing EBIC image where it possibly increases tip noise, uncheck Beam Monitor Active on the SCAN MODE block in the operation panel.
3 - 34 3.5.5 Focus and Astigmatism Correction Focus and astigmatism correction can be done manually and automatically. Focus Monitor mode is available for manual focusing. (1) General Method for Focusing and Astigmatism Correction Focusing and astigmatism corrections are related to each other and need to be repeated alternately.
3 - 35 little or no surface detail on the specimen, or when the specimen is charged, Auto Focus does not operate properly. (3) Manual Focus Manual focusing can be done using the control knobs on the operation panel or the mouse in the Scanning Image window.
3 - 36 (6) Focus Monitor Mode A waveform is displayed for monitoring the focus. The magnification is set at 1,000×. To start the Focus Monitor, click the Monitor icon on the control panel and focus the image so that the waveform shows sharp peaks.
3 - 37 3.5.6 Operation of the Specimen Stage (Type I - Manual Stage) The S-4800 type I SEM provides a 5-axis manual stage. 3.5.6.1 Movable range and specimen exchange position The following table shows movable range and specimen exchange position. Movable Range Exchange position X 0 to 50 mm 25.
3 - 38 3.5.6.3 Tilt and Z axes limitation The allowable tilting angle depends on both Z axis position and specimen size. Figure of relationship between allowable tilting angle for various Z position is shown below. If the specimen height is set at higher than the standard setting, add the difference to Z and use the figure.
3 - 39 Important In case of φ 15mm and φ 25mm specimens, by applying limitation in X and Y directions written in page 3-40, the figure for 3 axes motorized stage (shown below) can be used. For avoiding damage of specimen and objective lens, be careful not to exceed limits of each axis.
3 - 40 Relationship between minus tilting angle and Z position is the same as manual stage. Movable range of X and Y directions (3 axes motorized stage) Type1 Specimen Size X Y φ 15mm 17.
3 - 41 3.5.7 Operation of the Specimen Stage (Type 2 - 5-Axis Motorized Stage) The S-4800 type 2 SEM provides a 5-axis motorized stage 3.5.7.1 Coordinate notation S-4800 utilizes two coordinate notation system, stage (mechanical) coordinate and sample coordinate.
3 - 42 3.5.7.2 Movable range and specimen exchange position The following table shows movable range and specimen exchange position. Mechanical coordinate and specimen coordinate expression are selectable for X and Y axes. The specimen coordinate is (0,0) at the center of the specimen holder.
3 - 43 3.5.7.3 Setting specimen size and detectors in use The specimen size and height and optional detectors set at its operating position in the specimen chamber need to be set correctly to keep the motion of each axis within allowable range. Use the following process.
3 - 44 3.5.7.4 Valious operation for specimen stage The following operation methods are available. (a) Operation on the Stage tab of the operation panel (all 5 axes) (b) Manual operation using trackba.
3 - 45 3.5.7.5 Stage tab Basically use the Stage tab of the operation panel for stage operation. SPECIMEN block Speed slider X / Y / R block Z / Tilt block (Set specimen size, height and detectors in .
3 - 46 3.5.7.6 X, Y, R axes operation (1) Manual operation using trackball Stage moves to the direction of rotating trackball. Amount of stage motion by ball rotation is linked with magnification. To move long distance, it is advisable to lower the magnification.
3 - 47 (5) Position display The size of specimen, its present position and rotation angle are displayed on the XYR position monitor area. The white circle shows specimen, blue rectangle movable area, red cross observing point, gray straight line rotation angle and green rectangle beam scanning direction.
3 - 48 NOTICE When the specimen height is set higher than the standard position, actual specimen surface position will be changed by tilting. The allowable range of Z and Tilt are therefore recalculated after the tilting angle is specified for movement.
3 - 49 3.5.7.8 Stage mouse operation on the scanning image The mouse operation tools on the scanning image, for image adjustment (focus, stigma, contrast) and for stage operation, alternates by clicking the S button of the mouse. The following tools are shown for stage operation.
3 - 50 (3) RISM function If the end point of the above operation is near the center of the image, the red line is changed to a yellow line and the end point is positioned at the center of the image.
3 - 51 (5) R axis operation to a specified angle On the circle of the R axis tool, mouse pointer will be changed as shown below. Press down the left button and move the mouse holding down the button. The tool rotates following mouse and the rotation angle is shown in the indicator box.
3 - 52 (7) Z axis operation to a specified coordinate On the circle of the Z axis tool, mouse pointer will be changed as shown below. Press down the left button and move the mouse up or downward holding down the button. The circle moves following mouse and the Z axis value is shown in the indicator box.
3 - 53 (9) Tilt axis operation to a specified coordinate On the circle of the Tilt axis tool, mouse pointer will be changed as shown below. Press down the left button and move the mouse up or downward holding down the button. The circle moves following mouse and the Tilt axis value is shown in the indicator box.
3 - 54 (11) Rotation adjust tool The rotation adjust tool is convenient for adjusting a line in image to horizontal. Move the mouse at about the center of the tool. Mouse pointer will be changed to array mark . Press down the left button and move the tool to fit an end to the inclined line part to be rotated to horizontal.
3 - 55 3.5.7.9 Position memory function The stage coordinates, both absolute and relative, can be memorized and retrieved. 200 absolute coordinates (20 points on each of the 10 pages) and 20 relative coordinates can be saved in total. Click the Memory button on the Stage tab.
3 - 56 (6) Moving the stage by relative movement To move the stage by a relative movement from the present position, select a page Rel and click Go . (7) Clear registered data Select a coordinate number and page, and click Clear.
3 - 57 Click Go button to go to the position represented the selected point. (4) Deleting registered points To delete points individually, select the point and click the Delete button. To delete all points, click the Clear button. (5) Saving and reading history data To save displayed position data, click the Save button.
3 - 58 use any one selecting with << and >> button. By clicking a point on the navigation image, coordinate of the specified point is calculated and stage is driven so as the point comes to the center of field of view. The Need Refresh indication is green when the present selected image is effective, and is blinks red when ineffective.
3 - 59 the center of image and then, click the 1st button. (3-3) Find the first alignment point in the navigation image and click it. The next message [Move a remarkable object to the center of image and click 2nd button, click the position in the navigation image corresponding to the remarkable object by mouse.
3 - 60 Stage movable area 5 inches sample (-35､-55) (75,-55) (-35,55) (75,55) (0,0) (-35,0) (-62.5,0) (62.5,0) (0,62.5) (0,-62.5) X Y (-34,10) (-50,10) AB The gray area is not covered with X and Y movable range but can be observed with stage rotation.
3 - 61 be shown. (a) When the present position is 2mm or less near to the X or Y limit OK rotates the stage and move X and Y axes so as the specified point comes under the beam. (b) When the present position is 2mm or more far from the X and Y limit In this case, stage is not rotated.
3 - 62 The above (a) and (b) are basically dependent on in assembling error of the instrument. These are measured and corrected once in the beginning (before delivery of the instrument).
3 - 63 1. [Rotation Center]: A mask holder specimen cannot be used. 2. [Tilt Center]: A BSE detector must be pulled out. 3. [Z Axis Comp.]: Both EDX and BSE detectors must be pulled out. And mask holder specimen cannot be used. 4. [Tilt Center] started by Calibration button: GW and ETP type BSE detectors must be pulled out.
3 - 64 As described in the message, bring the structure of interest to the image center at a magnification of about 500 × , then click Enter button of Tilt 0 deg. (d) Bring the stage to a tilt angle of 30°. Again bring the structure of interest to the image center, and click Enter button of Tilt 30 deg.
3 - 65 (e) The specimen rotates to an angle of 90°. Again bring the point of interest to the center and click Enter button. (f) In the same way, each click of Enter button rotates the specimen 45° at a time. Bring the point of interest to the center each time and then click Enter.
3 - 66 (a) Insert a specimen, set WD at 30 mm, tilt at 0° and R at 0°. Set the accelerating voltage to 5 kV or less, Probe current mode to Normal and Focus mode to UHR. Then search for a structure of interest near the specimen center. (b) Select Stage Calibration – Z Axis Comp command in the Option menu.
3 - 67 3.5.7.15 Stopping stage and Returning to previous stage position To stop stage movement while it is running, use the !STOP button on the Control panel. Do not repeat to click the button. It may cause irregular movement. To return to a previous position after moving stage using coordinate specifying operation, use Undo – Stage Drive menu.
3 - 68 3.5.7.16 Moveable range and limitation by optional detectors (1) Movable range of the specimen stage for various specimen size The movable range is limited when observing large size specimens. Stage motion is limited to inside of movable r ange automatically by computer.
3 - 69 Possible to observe by rotation (0,17.5) （35,55) (0,92.5) （72.5,92.5) Area of observation 75mmφ φ75 specimen （72.5,17.5) (0,5) （35,55) (0,105) （85,105) Area of observation 100mmφ φ100 specimen （85,5) Possible to observe by rotation (0,0) （35,55) (0,110) （97.
3 - 70 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 40 Z ( m m ) T (deg) <φ15m m φ25m m φ 50m m φ75m m φ100m m φ125m m φ150m m φ200m m Fig 3-2 Allowable plus Tilting angle for various specimen size -6 -5 -4 -3 -2 -1 0 1.5 2 2.5 3 3.5 4 4.5 5 5.
3 - 71 3.6 Saving and Recording Images 3.6.1 Saving and Recording Images It is possible to record images using conventional photo films and printers, and/or as image data files (to disk or hard drive).
3 - 72 3.6.2 Preparing Images for Recording The source of image to be recorded is frozen image in the image memory except for direct photographing. (1) Freezing an image (a) Using Run/Freeze button Scanning image will be frozen. When scanning speed is slow, scanning continues to end of the frame and then, frozen.
3 - 73 (b) Data Entry When recording scanning images, graphics and texts written using Data Entry function are recorded as they are shown on the scanning image. When recording captured images using command buttons placed on the captured image window, graphics and texts written before capturing are embedded into captured images and recorded.
3 - 74 • 5120x3840 Highest resolution. Effective for relatively low magnification and containing very fine structure. Note that the large image size requires long processing time for creation, saving, loading and image processing. NOTICE For large size captured images, there are following limitations.
3 - 75 The Captured Image window opens by Capture button on the tool bar section of the operation panel, Captured Image command in the Window menu and the shortcut [Ctrl – L] at any time. Refer to <2.3.9 Captured Image Dialog Window> 3.6.5 Saving a Scanning Image (Direct Save) The scanning Image, simply frozen or captured, can be saved.
3 - 76 (4) Set options. The saved data is automatically registered to SEM Data Manager database when the SDM Register is checked. Graphics and texts written on the scanning image is embedded when the Embed into Image is checked. (5) Specify folder and file name.
3 - 77 (1) Setting Photo Condition To select the conditions for photo recording, open the Setup dialog window – Record tab by clicking the icon on the tool button section of the operation panel, or by selecting the Photo Condition command in the Setup menu.
3 - 78 [Photo Size] Select a size of film. The magnification value is adjusted internally according to the selected size. ×0.6: For Type 120 Negative film ×0.8: For small size Polaroid film (type 107, 105 or equivalents) ×1.0: For 4 × 5 Polaroid film (d) X Ray Mapping Intensity Check it to brighten low density X-ray mapping image.
3 - 79 3.7 Using SEM Data Manager SEM Data Manager is an image filing program with an easy-to-operate database function. A database table is established for each user, and acquired SEM images are registered to this table automatically when saving.
3 - 80 3.8 At the End of Daily Use 3.8.1 Turning High Voltage Off (1) Close opening dialog windows. Save data if necessary (2) Click the HV OFF button on the control panel. 3.8.2 Setting the Stage at the Specimen Exchange Position Set the all 5 axes of the specimen stage at the exchange position.
3 - 81 Turn the knob counterclockwise so as the Lock mark comes upwards to hook on the specimen holder. Looking in the chamber and confirming that the specimen holder comes out with the rod, pull out the rod completely. (3) Press the AIR button on the specimen exc hange chamber.
3 - 82 3.8.4 Closing Windows and Shutting the Display Power At the end of daily use, shutdown the display power after closing Windows. (1) Click on the title bar or select the Exit command in the File menu. (2) The Exit dialog window is brought up. Click the OK button.
3 - 83 3.9 Using Other Functions 3.9.1 Screen Mode Screen modes, Full, Dual or small are selectable with SCAN SIZE block of the oper ation panel. (1) Full screen mode: A scanning image is displayed with full desktop size. Image resolution is 1280×960 pixels.
3 - 84 (3) Dual screen display mode: Two 640×480 pixel images are shown simultaneous ly. These two images can be live or frozen independently, and can display different or the same signal. In this mode, color mixing is available, while analysis modes (line, spot and area ana lysis) and split screen modes are disengaged.
3 - 85 (c) Capturing images The small indicators below the Capture button shows which screen is to be captured. You can change the indication by clicking the indicators. Green color in dicates corresponding screen will be captured by the Capture butto n.
3 - 86 The Split/Dual Mag controller is brought up and the scann ing image area is divided in two. The magnification ratio of two images is selected with ×1 , ×4 , ×8 buttons on the controller. In the case of ×4 or ×8 , a box cursor corresponding to the field on the right side is shown in the left image.
3 - 87 screen) image, and right side box for right side (B screen) image. Brightness and Contrast knobs on the manual operation panel is applied to the signal selected with the Signal A/B selection buttons.
3 - 88 3.9.4 X-ray Analysis Mode Scanning modes for analysis are available in the Full and Small screen modes. Use the SCAN MODE block in the operation panel.
3 - 89 button and click the Direct Photo or Memory Ph oto button. Recommended procedures for taking a photograph is; ① Observe an image in Position Set mode at Slow3 or slower scanning speeds. Click the Line Analysis button when the scanning raster reaches the bottom of the screen.
3 - 90 specified area on the specimen. The Area Analysis button is used for two scanning modes as follows. (a) Position Set mode for Area Analysis Upon the first click of the button in other scanning modes or in Area Analysis mode, a box cursor with dotted line is overlaid on the image.
3 - 91 The following processing are available. (a) Smooth (1/2) Reduces snow noise. It is effective especiall y at high magnification, where originally image itself has defocusing limited by spatial resolution. In this case, nnoise can be reduced without image defocusing.
3 - 92 (b) Differential: Differential 1 and 2 are high-pass filters for the image signal. When applied, the image is differentiated in a horizontal direction and details of the image are emphasized, while broad shades are suppressed. Results vary with scanning spe eds because it applies time domain differentiation.
3 - 93 (d) Save condition Click the Save button. The Condition Save dialog window will open. Input comment, specify a Condition name and then, click Save button. (2) Loading a Set of Operating Conditions Use the following steps to load a set of operating condition s.
3 - 94 3.9.7 Pseudo Color Display Use function of SEM Data Manager for pseudo Color imaging. 3.9.8 Data Entry Function Use the DATA ENTRY block on the Operation panel for drawing graphics and texts on the scanning image display. For saved image, use the same function provided in the SEM Data Manager.
3 - 95 (d) Line Draw lines on the image. Click this button, and press the left button of the mouse to create the starting point of the line on the image. Move the mouse to an end point and then release the button of the mouse. While this button is depressed, you can repeat a line drawing.
3 - 96 (q) Select buttons or button selects graphics or text on the image in order. A selected graphics is indicated with gray color and a surrounding dotted line box. A selected text is indicate d with gray color and black background. They can be moved and re-positioned by mouse dragging.
3 - 97 3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation (1) Raster Rotation Scanning of electron beam can be rotated within a range of -200º to +200º, using the slider. This allows observation of an image at the best orientation. Use the R.
3 - 98 screen. Adjust Dynamic Focus slide r for the best focus. And use the following steps to use Tilt (magnification) compensation. (a) Set the Raster Rotation angle at 0 . In this condition, direction of the compensation coincides with the tilting direction.
3 - 99 3.9.11 Printing images using Report generation function The scanning image or saved image can be printed using a Windows-supported printer. (1) Report Generation function The Report Generation window will open by selecting Layout Print from the File menu or clicking the Print button on the control panel or on the Captured Image window.
3 - 100 Photo Size button sets the default 4x5 inches photograph size. Or you can set any size desirable. (4) Adjusting layout and image size To adjust image size on the sheet, select an image by clicking it and drag the lower-right corner. To move an image, drag it using mouse.
3 - 101 The result of adjustment is applied to the image on the sheet by OK button. (7) Print Set number of print on the Setting tab and then, click Print button.
3 - 102 3.9.14 Oblique Image An oblique (or birds-eye-view) image is formed from scanning image. To open the Oblique window, select the Oblique command from the Analysis . (1) Setting properties Check the Image box to show reference image together with oblique image.
3 - 103 3.9.15 Optional setting Operation environments are set on the Optional Setup dialog window. To open the Optional Setup dialog window, select the Optional Setup command from the Option menu or click the Opt Setup button on the tool button area of the operation panel.
3 - 104 (2) Operation Panel tab The arrangement of control blocks to be placed on the operation panel can be customized. (3) Tool bar Setting tab Select tool buttons to place on the t ool button section of the operation panel. Tool buttons put check mark are shown on the tool butto n section.
3 - 105 3.9.16 Password Setting Use the Password Setting dialog window for setting or changing the password of the login name for current user. To open this dialog window, select the Password Setting command from the Option menu. The present login name is shown in the User box.
3 - 106 Option menu. (3) Select the “S-4800” in the Login Name list. Set a password for the name. Input Old Password, if already set, and input new password to New and Confirm Password box and then, click the Change button. If you do not open the password to other users, they can not use the login name “S-4700” for next login.
3 - 107 3.10 Image Quality The followings are references for getting better image quality. 3.10.1 Accelerating Voltage and Image Quality There is a multitude of accelerating voltages to choose from. Resolution, image quality, charging and other effects are greatly determined by the selected accelerating voltage.
3 - 108 3.10.2 Condenser Lens Setting and Image Quality Probe current is adjusted by changing the Cond Lens 1 value. To increase probe current, select a lower Cond Lens 1 value (larger spot size). Information necessary for setting of Cond Lens 1 is as follows.
3 - 109 3.11 Mechanical Column Alignment For normal operation, mechanical alignment of the electron gun and condenser lens is not necessary. If, however, an electromagnetic alignment is not sufficient.
3 - 110 (5) Set the Z axis of the stage at 8 mm and set the WD at 8 mm in the Column Tab. (6) Set the lowest magnification in High Mag Mode. (7) Set the beam monitor aperture and the objective lens aperture to O (open). (8) Open the Alignment dialog window and click the Reset All button.
3 - 111 3.11.4 Alignment of the Objective Lens Aperture (1) In the Beam Align mode, set the objective lens aperture at 2 or 3 . Aperture diameter is opening 1 ： 100 µ m opening 2 and 3 ： 50 µ m opening 4 ： 30 µ m (2) Adjust the brightness and contrast if the circular image becomes dark.
3 - 112 (5) Click the DeGauss button in the Column tab and adjust focus again. (6) Click the Aperture Align button in the Alignment dialog window, and adjust alignment knobs of the second condenser lens so that wobbling motion of the image is reduced.
3 - 113 After completing column alignment, the indicator beside the Beam Monit button may blink in red color. If it is, click the button. The indication will become green color, ind icating that it is working correctly. NOTICE: When you changed accelerating voltage, make electro-magnetic column alignment referring to 3.
3- 114 3.12 Using SEM Data Manager SEM Data Manager is an image filing program with an easy-to-operate database function. A database table is established for each user, an d acquired SEM images are registered to the table automatically when saving.
3- 115 3.12.2 Functions 3.12.2.1 Image Database The top part of SEM Data Manager window when opened is as follows. Selection items D a t a t r e e a r e a (1) Opening a database Database name is shown on the Data tree area. Double click the database to open.
3- 116 ▪ signal, Keywords : Put when saving. ▪ Sample ▪ Keyword1 / 2 ▪ Media 3.12.2.2 Menu and tool buttons The following picture shows an example where image is open. Functions of menu commands are as follows. Corresponding tool buttons are shown in parentheses.
3- 117 Remove the image from database. Image file do not erased. ▪ Delete Delete the image. Image file is erased. ▪ Rename Rename the image file.Save the image on the display area. ▪ Layout Print ( ) The Report Generation window opens for printing images.
3- 118 Enable or disable image enlargem ent by clicking on the imag e. Mouse pointer is the mark when it is enabled. ▪ Show thumbnail Shoe or hide thumbnail display. ▪ Viewer Open ( ) Open a viewer window and display the mage. The window remains even when SEM Data Manager is closed.
3- 119 ▪ Data Entry （ ） Draw shapes and characters on the image. ▪ CD Measurement （ ） Open CD Measurement dialog window (Optional function) (6) Tool menu ▪ Options Open Options dialog window. Use for setting size of thumbnail, character font and others.
3- 120 (2) Registering images stored on disks To register already saved images to the SEM Data Manager database, use Add from File command in Database menu or the Add from File button on the tool bar. The following Add from File dialog window will open.
3- 121 with mark. NOTICE When you changed one of selection item, the data tree will be closed. O pen the tree again. To make a new user name, Use Make New User command in Database menu or Make New User button on the tool bar. Input a user name and click OK.
3- 122 3.12.3.4 Image information Information of the present selected image is shown on the image information area. You can edit Sample, Comment, and Keywords.
3- 123 (1) Function of tool buttons Function of tool buttons in the Data Entry toolbox is similar to the function on S-4800. (a) Edit text Edit already written texts . Selecting the Edit button changes mouse pointer to mark. Click the text to be edited.
3- 124 and then releasing the mouse button. While this button is depressed, you can repeat drawing of a shape (k) Rectangle Draw rectangles on the image. Click this button and press the left button o f the mouse to create a starting point on the image.
3- 125 The Clear button erases the selected data. To erase all, select all data by clicking button and then, click the Clear button. (5) Saving image with entry data Click OK to fix entry data. Use Save as command in File menu or Save button on the tool bar.
3- 126 → → (4) Contrast inversion The Negative button inverse black and white. (5) Gamma correction A Gamma value of larger than 1 enhances dark area and suppresses highlight area. A value smaller than 1 suppresses dark area and enhances highlight area.
3- 127 (a) Color Mode and Color Order • Off : No coloring • Color1 or Color2 : Convert gray scale value to RGB color as following figures. The L, M and H represent R, G or B color specified by Color Order setting.
3- 128 3.12.3.8 Image Processing Digital image processing for noise reduction, in creasing sharpness and detail enhancement are available. Open the Image Processing tool window by Image Processing – Processing command in Processing menu or Processing button on the tool bar.
3- 129 3.12.3.9 Color Mixing Creates color composite image using two original images. It is applicable for color composition of two different signal images, or stereo imaging using co lor grasses. Positional alignment of two original images is possible.
3- 130 Select color for source images. Check Color and select R, G or B button. Select a mixing mode in the mixing selection box. • ADD : Add A and B source images. When A and B is different single color, use it. • AVG : Average of A and B source images is used.
3- 131 3.12.3.10 Printing images Use Layout Print command in File menu or Layout Print button on the tool bar. The Report Generation window will open with the present selected image on the layout sheet. Double click a thumbnail image to add it to the layout sheet.
3- 132 3.12.3.12 Batch operation of image files Plural of image files can be operated at once. Use Batch Process command in Database menu or Batch Process button on the tool bar.
3- 133 down the button to the last selecting file, and then, release the button. Selected files are shown by reverse color. (b) Click the first selecting file and then, click the last selectin g file holding down the Shift key. (c) Click selecting files holding down the Ctrl key.
3- 134 3.12.3.13 Slide show Use the Slide Show controller for viewing images in continuous slid e motion. To open the Slide Show controller, use Slide Show command in View menu or Slide Show button on the tool bar. 3.12.3.14 Optimizing and repairing database file Use Database Utility command in Tool menu.
4- 1 4. MAINTENANCE 4.1 Maintenance of Electron optical Column 4.1.1 Maintaining Vacuum of Electron Gun and Intermediate Chamber The electron gun shall be continuously evacuated. Keep ion pump power supply ON even when SEM is not operated. If ion pump vacuum degraded than the following value, perform gun baking.
4- 2 (4) Disconnect two BNC type connectors from the objective lens aperture unit. Remove four screws fixing the flange of the unit. Pull off the unit straightly holding the flange.
4- 3 (13) Clean the aperture support and aperture holder by means of polishing paste, absorbent cotton (wound on a bamboo stick) and acetone. Cleaning should be done meticulously. (14) Mount an aperture plate, new or cleaned up, on the aperture holder.
4- 4 (7) After completion of heating, wait for 10 to 15 minutes and introduce air into the vacuum evaporator. Then remove the aperture plate with tweezers.
4- 5 4.2 Maintenance of Rotary Pump （ Only for P/N 539-9010 and 539-9060 ） NOTICE Instruments shipped to Europe area where CE mark ing conformity is necessary do not provide with the rotary pump. Also instruments those shall be compliant to SEMI-S2 guideline do not provide with the rotary pump even when shipped to outside of Europe area.
4- 6 (2) How to Inject Oil Inject oil through the oil injection port so that oil level reaches the center of the red circle in the oil gauge. NOTICE : If the oil level is below the lowest point of the red circle, pump performance may be degraded or oil may be deteriorated earlier than usual.
4- 7 4.2.3 Troubleshooting Symptom Cause Countermeasure Power failure or voltage drop below 90 V. Check the power supply. Pump does not rotate at all. The breaker switches off immediately. When turning on the switch, pump buzzes and does not start. Oil highly viscous because the ambient temperature is low (below 9 ° C).
4- 8 4.3 Maintenance of Air Compressor （ Only for P/N 539-9010 and 539-9060 ） NOTICE Instruments shipped to Europe area where CE mark ing conformity is necessary do not provide with the air compressor.
4- 9 NOTICE : 1. The mark “ ○ ” indicates the time period after start of operation or replacement of the part. The mark “ ● ” shows the time point of part replacement. 2. The above table shows the standard inspection cycle. The inspection cycle changes slightly with the operating conditions (temperature, humidity, etc.
4- 10 4.3.2 Troubleshooting of Air Compressor If the air compressor becomes faulty, reference should be made to the following table. Symptom Probable Cause Remedy Air compressor rotates. Drain or stop valve leaks. Reti ghten. If the valve still leaks, replace with a new one.
4- 11 4.3.3 Location and Functions of Major Components Drain cock Air tank Motor Push solenoid (single phase type only) Suction filter Removes dust and dirt in suction air. Safety valve Relieves compressed air at abnormal rise in pressure. Starts and stops compressor.
4- 12 4.4 Troubleshooting 4.4.1 When Column Evacuation does not Work When the column evacuation system does not work, check the followings. (1) Is an error message shown? If an error message is shown on the evacuati on control panel, refer to XXXXXX to find the cause of the error and make countermeasure to it.
4- 13 (4) If you do not find any failure mentioned above, contact a service engineer. 4.4.3 When Specimen Chamber Vacuum is not Good If HV applicable status (HV indicator on GUI blinks in yellow and ON button is enable) is not given even after about 1 to 1.
4- 14 4.4.5 When Emission Current is not Set at Normal Value When emission current is not set at a normal value when you applied HV, check the followings. (1) If emission current indicator is not zero but smaller than the value selected in the Set Ie to box in the HV control dialog window, check the value of Vext on the dialog window.
4- 15 4.4.7 When Image is Very Noisy There may be three types of noise on scanning images. The first is a snow noise which appears uniformly on the image.
4- 16 4.4.8 When You cannot Correct Astigmatism If astigmatism still remains at the maximum correction level (One (and/or both) of Stigma sliders is set at the maximum or the minimum, or one (and/or both) of Stigma knobs on the operation panel is full), check the followings.
4- 17 4.4.10 When S-4800 control program does not start up When the progress bar on the login dialog window does not progress to the end, or the login dialog window disappear before completing start up, check the follows. (1) Check if the evacuation system is running.
4- 18 4.4.12 When Error Messages are shown Messages shown on the S-4800 GUI includes operation assist messages, warning for operation and messages showing instrumental error. Messages are shown with number. Refer to the list of messages in appendix page.
4- 19 4.7 Operation for Starting S-4800 (1) Turn the MAIN switch in the power distribution panel of customers site to ON. (2) At the back of the display unit, turn the MAIN breaker to ON and press the RESET switch. A sound of relay will be emitted form inside of the unit.
4- 20 Set the APT HEATER switch to AUTO. (6) For ion pumps vacuum recovery, usually hal f to one day is necessary. (it is shorter when short period power down) Check ion pump vacuum after waiting above time. If it is degraded than the following value, gun baking operation is necessary.
4- 21 4.10 Gun Baking operation CAUTION Gun baking operation must be carried out by a service engineer or a person who has been trained by Hitachi High-Technologies Corporation or its service representatives. Use the following steps for gun baking operation.
4- 22 (6) Mount the heater to the electron gun chamber. The heater consists of 2 parts. Fix them with the heater band. (7) Put two rods of inner bake read wire into the HV cable socket. Insert rods correctly to pins A and B at the bottom of the socket referring the right side picture.
4- 23 (11) Starting gun baking on the S-4800 GUI You can start gun baking on the S-4800 GUI or on the evacuation control panel. NOTICE Before starting gun baking, set WD to longer than 10mm on the OPE CONDITION tab of the Operation panel.
4- 24 After selecting baking time, check items described in above (11). And then, press START button. In both case starting gun baking on the GUI or evacuation control panel, an error will be shown in the Numeric / character display and buzzer sound if something incorrect setting is found.
4- 25 4.11 Caution on Maintenance On maintenance of the instrument, the following cautions must be observed. (1) Follow the maintenance procedures described in this manual after a full understanding of it. (In particular, carefully read “PRECAUTIONS ON HANDLING” at the beginning of the manual.
5 - 1 5. REPLACEMENT PARTS 5.1 Consumables and Spare Parts 5.1.1 Consumables The items shown in Table 5-1 should always be on hand for normal operation.
5 - 2 5.1.2 Replacement Parts The items below should be prepared in the necessary quantities. Table 5-2 Replacement Parts Part No. Part Name Use Expiration J386012 Photo multiplier R268 Secondary elec.
5 - 3 5.1.3 Spare Parts The items shown in Table 5-3 must be prepared for long-term operation. Select a proper quantity in consideration of the application of each part.
6.1.1 6 - 1 6. ACCESSORY OPERATION 6.1 Model S-5080 Auto-Camera (option) This camera is used for taking photographs of images displayed on the screen of CRT dedicated for photographing.
6.1 Model S-5080 Auto-Camera (option) 6 - 2 type 4 x 5 single-exposure unit type 4 x 5 Polaroid unit 6 x 7 roll film unit (P/N 589-9871) (P/N 589-9872) (P/N 589-9873) Image ratio = 1:1 Image ratio = 1:1 Image ratio = 1:0.
6.1.2 6 - 3 6.1.2 Specifications (1) Magnification : × 1.0, × 0.8, and × 0.6 (2) Lens : F = 75 mm (3) Aperture : f = 4.5 to 22, manual (4) Focusing : Manual (preset when shipped at the same time with the SEM) (5) Film type : Roll film 120, Polaroid TYPE52 (P/N 55), Polaroid 107 and 105 (the user is to buy the film.
6.1 Model S-5080 Auto-Camera (option) 6 - 4.
6.1.3 6 - 5 6.1.3 Assembling the Camera (1) Illustrated below are films for the standard PHOTO CRT. (a) type 4 x 5 film (magnification of 1.0) Fig. 6-3 4 ″ × 5 ″ Film (Magnification of 1.0) (b) Polaroid 107 film (magnification of 0.8) Fig. 6-4 Polaroid 107 Film (Magnification of 0.
6.1 Model S-5080 Auto-Camera (option) 6 - 6 6.1.4 Operation (1) Installing the Camera You should ask a service engineer for the installation. Take out the PHOTO CRT unit by referring to Figure 6-8. Screw four 5-mm screws to fix the camera on the PHOTO CRT panel.
6.2 Installation Manual for the SEC Guide Rail (for Installer) 6 - 7 PHOTO CRT unit Camera Apertur.
INDEX - 1 INDEX A ABCC ............................................................................... 2-22, 2-25, 2-27, 2-28, 2-32, 2-46, 2-47, 3-18, 3-19, 3-23, 3-25, 3-31, 3-32, 3-85 Accelerating V oltage ...........................................
INDEX - 2 C Calibration ............................................................................................................. 2-24, 3-62~3-66 Capture .............................................................................................
INDEX - 3 E Edit menu Copy Attribute command .......................................................................... 2-21, 3-101, 3-1 17 Copy Image command.............................................................................................
INDEX - 4 I Image Brightness .................................................................................................. 2-22, 2-29, 3 -31 Image menu Color Mixing command .........................................................................
INDEX - 5 O Oblique................................................................................................................ 2-23, 2- 54, 3-102 Operate menu ABCC command ............................................ 2-22, 2-52, 3-31, 3-32, 3-34, 3-35, 3-92, 3-93 Alignment command .
INDEX - 6 S Save Image ..................................................................... 2-21, 2-31, 2-51, 2-55, 3-75, 3-76, 3-1 19 Scan menu Capture command ....................................................................................... 2-23, 2-55, 3-85 S plit DM Mode command .
INDEX - 7 T T ilt Compensation ................................................................................................. 2-39, 3-97, 3 -98 T oolbar ...............................................................................................
Un punto importante, dopo l’acquisto del dispositivo (o anche prima di acquisto) è quello di leggere il manuale. Dobbiamo farlo per diversi motivi semplici:
Se non hai ancora comprato il Hitachi S-4800 è un buon momento per familiarizzare con i dati di base del prodotto. Prime consultare le pagine iniziali del manuale d’uso, che si trova al di sopra. Dovresti trovare lì i dati tecnici più importanti del Hitachi S-4800 - in questo modo è possibile verificare se l’apparecchio soddisfa le tue esigenze. Esplorando le pagine segenti del manuali d’uso Hitachi S-4800 imparerai tutte le caratteristiche del prodotto e le informazioni sul suo funzionamento. Le informazioni sul Hitachi S-4800 ti aiuteranno sicuramente a prendere una decisione relativa all’acquisto.
In una situazione in cui hai già il Hitachi S-4800, ma non hai ancora letto il manuale d’uso, dovresti farlo per le ragioni sopra descritte. Saprai quindi se hai correttamente usato le funzioni disponibili, e se hai commesso errori che possono ridurre la durata di vita del Hitachi S-4800.
Tuttavia, uno dei ruoli più importanti per l’utente svolti dal manuale d’uso è quello di aiutare a risolvere i problemi con il Hitachi S-4800. Quasi sempre, ci troverai Troubleshooting, cioè i guasti più frequenti e malfunzionamenti del dispositivo Hitachi S-4800 insieme con le istruzioni su come risolverli. Anche se non si riesci a risolvere il problema, il manuale d’uso ti mostrerà il percorso di ulteriori procedimenti – il contatto con il centro servizio clienti o il servizio più vicino.
